声表面波谐振式力学量传感器的发展与现状  

Development and current status of SAW resonator mechanical quantity sensors

作　　者：陈明[1] 王玮[1] 

机构地区：[1]西北工业大学自动控制系,陕西西安710072

出　　处：《传感器技术》2000年第5期1-3,共3页Journal of Transducer Technology

摘　　要：扼要回顾了国内外在声表面波力学量传感器方面一些重要的成就 ,阐述了声表面波力学量传感器的特点、基本工作原理 ,简单推导了该传感器输入 -输出关系 ,并对声表面波其他传感器作了介绍。Some important achievements of SAW mechanical quantity sensors at home and overseas are reviewed briefly, the characteristics and basic working principle of SAW mechanical quantity sensors are expounded, in the meantime, the relationship between input and output of the sensor is simply deduced, finally other types of SAW sensors are introduced.

关 键 词：声表面波 力学量传感器 谐振式 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]