一种新型MEMS器件中的近场辐射传热现象研究  

The Near-Field Radiative Heat Transfer Studying of a Novel MEMS Device

作　　者：冯冲[1] 唐祯安[1] 余隽[1] 薛严冰[2] 

机构地区：[1]大连理工大学电子科学与技术学院,辽宁大连116023 [2]大连交通大学电气信息学院,辽宁大连116028

出　　处：《传感技术学报》2013年第2期170-174,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(60806038;61131004;61274076)

摘　　要：以近场辐射传热方式利用光电器件中的热能制作热光电器件从而提高光电器件转换效率的思想已经被提出。基于该思想本文设计一种具有面对面平行悬空薄膜的新型MEMS器件,两悬空薄膜的间距为1μm。通过每个悬空薄膜中白金薄膜电阻,薄膜可以升温并同时测温。在存在近场辐射传热和不存在近场辐射传热两种情况下,加热下方的薄膜到相同温度需要不同的加热功率,通过实验测量这个功率差可以测量出薄膜间的近场辐射热功率,通过将实验数据与相同条件下黑体辐射传热功率比较,表明薄膜间存在近场辐射传热;并且,当上方薄膜温度为317.2 K时,通过近场辐射传热可以使下方薄膜的温度从293 K升高294.2 K,该温升为热电转换提供了条件。An idea of improving the efficiency of photovoltaic device has been proposed by using the near-field thermal radiation to implement a thermophotovoltaic device. Base on this idea, a novel device with two parallel free- standing membranes was designed in this work. The distance between the two membranes is one micrometer. The device was fabricated by the MEMS （ Micro Eleetromechanical System ） technology. Each membrane has a Pt （platinum） thin-film resistor so that the membrane can be heated to a temperature above ambient and the temperature can be detected simultaneously in its heating. By heating the lower membrane with and without the near-field heat transfer from the upper membrane, the heating power differences were experimentally measured to evaluate the near-field radiative heat power. The near-field radiative heat transfer between the two membranes was conformed by that the radiative heat power in the experiment was larger than that of black body radiation under the same temperature condition. And when the upper membrane worked as a hot emitter and its temperature was 317.2 K,the lower membrane temperature would increase from 293 K to 294. 2 K by the near-field thermal radiation ,which makes thermoelectric conversion possible.

关 键 词：MEMS 器件 近场辐射 传热 

分 类 号：TH89[机械工程—仪器科学与技术]