一种采用精缩机拼接斜线条图形的方法  

A Method for Making Oblique Rectangle by Using the Photorepeater

作　　者：黄迪辉[1] 黄征宇[1] 

机构地区：[1]中南大学物理与电子学院,湖南长沙410083

出　　处：《电子科技》2013年第5期22-23,26,共3页Electronic Science and Technology

摘　　要：提出一种由曝光单元拼接斜矩形线条的数学模型,基于该模型编制了一款数据处理程序。利用该数据处理程序和特制的光栏版,使精缩机实现图形发生器的功能,精确拼接出无锯齿状边缘的斜线条图形,为制作特殊的掩模版提供了一种实用的方法。A mathematical model of making oblique rectangle by a smaller rectangle is proposed and a proce-dure based on this model is programmed. By means of the procedure and a particular diaphragm, the photorepeater acts as a pattern generator. The oblique rectangles without any jagged edge are made accurately. It is a practical method for making particular photomasks.

关 键 词：精缩机 图形发生器 光栏 掩模版 

分 类 号：TN305.6[电子电信—物理电子学]