激光干涉法近场扫描架平面度高精度测量及误差分析  

High-accuracy Measurement on Flatness of the Near-field Scanner with a Laser Interferometer and Error Factors Analysis

作　　者：王宏伟 张文雯 

机构地区：[1]四川航天计量测试研究所,四川成都610100

出　　处：《计测技术》2013年第2期51-54,共4页Metrology & Measurement Technology

摘　　要：根据近场扫描架的结构和运动特点,运用非封闭网格法布线,通过双频激光干涉仪及其直线度附件来采集各条线在Z向的直线度,用最小二乘法求出扫描架X轴和Y轴所走轨迹扫描而成平面的平面度,并分析了影响直线度测量的误差因素。According to the structure and movement characteristics of the near-field scanner, Z-oriented straightness of each line, which is distributed by non-closed grid method, is acquired by a double-frequency laser interferometer and its straightness accessories. With method of least squares, the flatness of the plane, which is shaped by the trace of X-axis and Y-axis movement of the scanner, is computed. And error fac- tors, which affect straightness measurement, are analyzed.

关 键 词：激光干涉仪 平面度 最小二乘法 误差因素分析 

分 类 号：TB921[一般工业技术—计量学] TN247[机械工程—测试计量技术及仪器]