氮化铬过渡层对四面体非晶碳薄膜在高速钢基底上附着特性影响的研究  

The effect of the interlayer CrN on adhesion characteristics of ta-C films on high-speed steel substrate

作　　者：韩亮[1] 刘德连[1] 陈仙[2] 赵玉清[2] 

机构地区：[1]西安电子科技大学技术物理学院,西安710071 [2]西安交通大学电子与信息工程学院,西安710049

出　　处：《物理学报》2013年第9期363-369,共7页Acta Physica Sinica

基　　金：中央高校基本科研业务费专项资金资助(批准号:K5051205001)资助的课题~~

摘　　要：利用磁过滤阴极电弧与磁控溅射相结合的薄膜沉积技术在高速钢基底上制备了氮化铬/四面体非晶碳(CrN/ta-C)复合涂层,通过改变过渡层氮化铬(CrN)的制备工艺,研究了四面体非晶碳(ta-C)薄膜在钢基底材料上的附着特性的变化.结果表明,随着氮气流量的增大,CrN/ta-C复合涂层中的氮化铬经过了Cr-Cr2N-CrN的相变过程.同时涂层的附着力也随着氮气流量的增大而增加,但是当氮气流量超过30sccm时,涂层附着力会有所下降;通过改变基片偏压,复合涂层中氮化铬的择优取向与晶粒结构发生改变,随着偏压的增大,涂层附着力也会大大改善,但是当偏压超过200V,涂层附着特性会略微降低.通过涂层耐磨性的测试也表明,在高速钢基底上,CrN涂层能显著提高ta-C薄膜在高速钢基底上的附着力,同时显著提高耐磨特性.CrN/ta-C composite coating on a high-speed steel substrate is performed by magnetic filtered cathodic arc technique and magnetron sputtering technique. Adheision of ta-C film on the high-speed steel substrate is studied by changing the preparation process of a buffer layer of CrN. The results are as follows. With the increase of nitrogen flow, the buffer layer chromium nitride experiences the phase transition of Cr-Cr 2 N-CrN; the adhesion of the coating is improved with the increase of nitrogen flow, but when the nitrogen flow exceeds 30 sccm, the adhesion of coating will decline; the preferred orientation and grain structure of chromium nitride are changed by adjusting the substrate bias; the adhesion of the coating is improved with the increases of the bias voltage, but when the bias voltage exceeds 200 V, the the coating adhesion characteristics will be slightly reduced. The abrasion resistance of the test also shows that CrN coating can significantly improve the adhesion of the ta-C film on a substrate of high speed steel, and can also significantly improve the wear characteristics.

关 键 词：附着力 四面体非晶碳薄膜 X射线衍射 拉曼光谱 

分 类 号：O484.1[理学—固体物理]