低变形镍模具微电铸加工的工艺优化(英文)  

Optimization of Micro Electroforming Process for Fabrication of Low Deformation Nickel Mold

作　　者：刘冲[1,2] 柯学[1] 李经民[1] 段亚杰[1] 

机构地区：[1]大连理工大学辽宁省微纳米技术及系统重点实验室,大连116024 [2]大连理工大学精密与特种加工教育部重点实验室,大连116024

出　　处：《纳米技术与精密工程》2013年第3期271-276,共6页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(91023017,20890024,91023046,51105060);国家重点基础研究发展计划(973计划)资助项目(2007CB714502);中国博士后科学基金资助项目(20100481237,201104601)

摘　　要：微电铸工艺提供了一种有效的技术手段来制造金属模具,这种金属模具可被用于微图形的复制.模具的微电铸加工存在一个瓶颈问题:模具表面的不平整.金属模具的弯曲是造成模具表面不平整的主要原因之一.金属模具的弯曲变形会对微结构的复制精度产生影响.为了获得低变形镍模具,对微电铸工艺参数进行了优化.优化后的微电铸液中含有的镍离子质量浓度为80～90 g/L,硼酸的质量浓度为40～45 g/L,并且加入了0.3%L-1的润湿剂,其pH值控制在3.7～4.2之间.微电铸液的温度保持在50～55℃.在微电铸过程中,采用了电流密度为2～3A/dm2的脉冲电流,占空比为0.2.结果表明:采用优化后的工艺参数,可以获得低变形的镍模具,其变形量下降了19%.利用优化后的微电铸工艺,加工了一种可以用于热压工艺的镍模具,模具上的图形线宽为5μm,深度为5μm.Micro electroforrning is an effective technique for fabricating metal mold which can be used for the replication of micro-features. A bottle-neck problem in the mold electroforming is the unevenness for the mold surface. And the bend deformation of the metal mold is one of the main causes of the uneven- ness of the mold surface which will bring adverse effects on the size precision of replicated microstruc- tures. In this paper, micro electroforming process parameters were optimized to obtain low deformation mold. The electroforming solution contained 80--90 g/L nickel （Ni） ion, 40---45 g/L boric acid and 0. 3% L-l wetting agents, and its pH value was 3.7--4.2. The electroforming temperature was con- trolled at 50--55 ~C. The pulse current was used during electroforming with a density of 2--3 A/dm2 and a duty cycle of 0.2. Results show that by using the optimized parameters, the deformation of the metal mold was reduced by 19%. A Ni mold, which contains the micro-features of 5 p,m in width and 5 I^m in height, was fabricated for hot embossing.

关 键 词：微电铸 镍模具 低变形 工艺优化 

分 类 号：TQ153.43[化学工程—电化学工业]