磁控溅射制备全固态薄膜锂离子二次电池及其性能研究  

Performance of All-solid-state Thin Film Lithium-ion Secondary Batteries Deposited by Magnetron Sputtering

作　　者：耿利群[1] 任岳[1] 王定友[2] 朱仁江[1,3] 陈涛[1] 

机构地区：[1]重庆师范大学物理与电子工程学院,重庆401331 [2]江西机电职业技术学院电气工程系,江西南昌330013 [3]重庆大学物理学院,重庆400030

出　　处：《重庆师范大学学报（自然科学版）》2013年第3期111-114,共4页Journal of Chongqing Normal University:Natural Science

基　　金：重庆市科技攻关计划项目(No.CSTC2009AB6138);重庆长安新能源汽车有限公司资助项目(No.CSTC2010AB6110)

摘　　要：在SUS304不锈钢衬底上以粉末靶材为溅射靶源,利用射频磁控溅射技术制备出非晶态结构的V2O5、LiPON和LiMnO4薄膜,并借助扫描电子显微镜(SEM)测试手段对薄膜的形态进行表征。用此3种沉积的材料依次作为薄膜电池的负极、固体电解质和正极,金属钒则作为集电极,成功制备出全固态薄膜锂离子二次电池。实验结果表明,截止电位控制在0.3～4.0V之间测试时,该薄膜电池具有良好的充放电特性;经过500次循环后﹐其电化学性能趋于稳定﹐放电容量保持在2.67μAh/cm2左右;采用恒定电流为20μA进行循环性能测试时,首次放电容量达到4.41μAh/cm2,循环寿命则可达到1 500次以上。Amorphous V2O5, I.iPON and LiMnO4thin films are prepared on the SUS304 stainless steel substrate with the powder target by RF magnetron sputtering technique. Then, the surface and section morphology of thin films are characterized by SEM. The all-solid-state thin film lithium-ion secondary battery is obtained successfully. Here, the above three films deposited and vanadi- um are regarded as negative electrode, solid electrolyte, positive electrode and the collector, respectively. It is indicated that the thin film battery has a good charge-discharge characteristics in the voltage range of 0.3-4.0 V. Moreover, the discharge capacity of lhe cell maintains 2.67 μ Ah/cm2 after it takes 500 cycles. In the case of a constant current 20 μA, the first discharge capacity is 4.41 l,Ah/cme , and this battery can be cycled more than 1 500 cycles.

关 键 词：全固态薄膜锂离子二次电池 磁控溅射 制备 电化学性能 

分 类 号：TM912.9[电气工程—电力电子与电力传动]