基于视觉对准的非硅MEMS微小型结构件微装配系统  

Micro-Assembly System for Non-Silicon MEMS Micro Devices Based on Vision Alignment

作　　者：周智[1] 张之敬[1] 张晓峰[1] 唐永龙[1] 

机构地区：[1]北京理工大学机械与车辆学院,北京100081

出　　处：《兵工自动化》2013年第5期79-81,84,共4页Ordnance Industry Automation

基　　金：国家自然科学基金资助项目(51127004);国防基础研究资助项目(0920110013)

摘　　要：为满足非硅MEMS微小型结构件的高精度柔性装配需求,设计一种基于正交光路分时成像视觉对准的机器人串行微装配系统。介绍目前微小型结构、非硅MEMS和机器人微装配系统的发展概况,给出其总体结构组成及典型装配过程,重点分析视觉对准系统摄像机标定方法,对标定误差进行分析,最后对装配系统进行非硅MEMS典型零件装配实验分析。结果表明:所设计的装配系统视觉系统检测精度≤5.5μm,能满足一般精度的非硅MEMS微小型结构件装配要求。For meet the high precision and flexible assembly requirements of non-silicon micro devices, a serial automatic robotic micro assembly system is developed based on the orthogonal optical time-sharing imaging vision alignment detection system. The overview of current micro devices, non-silicon MEMS and robotic assembly system is introduced and the overall structure of developed assembly system and its typical assembly process is given. The calibration of vision alignment detection system＇s camera is mainly focused on, and the calibration error is also analyzed. Finally, assembly experiments of typical non-silicon micro components are implemented. And the result shows that the detection error of designed micro assembly vision alignment system is less than 5.5 μm, and it meets the assembly requirements of general typical non-silicon micro devices.

关 键 词：非硅MEMS 微小型结构 微装配 摄像机标定 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置]