晶体结构对Er/Yb共掺TiO_2薄膜荧光光谱的影响  

Influence of Phase Structure on Photoluminescence Spectrum of Er/Yb Co-Doped TiO_2 Films

作　　者：谭娜[1] 

机构地区：[1]中国民航大学航空工程学院,天津300300

出　　处：《真空科学与技术学报》2013年第3期249-252,共4页Chinese Journal of Vacuum Science and Technology

基　　金：校科研启动基金项目(07qd01s)

摘　　要：通过对不同退火温度下Er/Yb共掺TiO2薄膜的结构和光致荧光光谱(PL)的分析,研究了退火处理所导致的晶体结构变化对薄膜荧光光谱的影响,探讨了薄膜的结晶状态在Er3+激活、荧光光谱形状等方面的作用及可能的物理机制。研究结果表明:退火处理所导致的Er3+的PL的变化与薄膜的相结构之间有着密切的联系。退火温度低于700℃时的宽化谱和Er/Yb共掺TiO2薄膜的非晶结构有关,多峰结构的PL是Er3+在烧绿石相ErxYb2-xTi2O7中的典型特征。The Er/Yb Co-doped TiO2 thin films were deposited by RF reactive magnetron sputtering on substrates of n-type Si（100）.The influence of the growth conditions on the microstructures and photoluminescence of the TiO2 films were evaluated.The Er/Yb co-doped TiO2 films were characterized with X-ray diffraction and photoluminescence spectroscopy（PL）.The results show that the annealing temperature significantly affects its phase structures and photoluminescence spectrum.For example,annealing at 700℃ resulted in broadening of the main PL peak,possibly because of the amorphous structure of the Er/Yb co-doped TiO2 thin films.The multi-peaked PL spectrum is known to be the typical feature of Er3＋ ions in a pyrochlore phased ErxYb2-xTiO7.

关 键 词：晶体结构 ER Yb共掺 TIO2薄膜 荧光光谱 

分 类 号：O484[理学—固体物理]