Al_2O_3-Cr多层中高温选择吸收薄膜的研究  

Growth of Al_2O_3-Cr Multi-Layered Coatings for Solar Selective Absorption at Medium and High Temperatures

作　　者：潘永强[1,2] 弥谦[1,2] 杭凌侠[1,2] 

机构地区：[1]西安工业大学光电工程学院,西安710032 [2]西安工业大学陕西省薄膜技术与光学检测重点实验室,西安710032

出　　处：《真空科学与技术学报》2013年第3期267-270,共4页Chinese Journal of Vacuum Science and Technology

基　　金：陕西省教育厅重点实验室科研计划项目(12JS047)

摘　　要：太阳能选择吸收薄膜是太阳能集热器的关键部分,本文提出基于Al2O3介质和金属Cr的多层结构的选择吸收膜系,首先采用电子束热蒸发在硅基底上沉积了单层Cr薄膜,通过椭偏仪测试并分析了Cr薄膜的光学常数。在此基础上分别设计了Al2O3-Cr四层和六层选择吸收膜系,比较了两种膜系的吸收率和发射率。其次,对六层结构的选择吸收膜系进行了允差分析,给出了最敏感层厚度相对误差为20%时,选择吸收膜的吸收率和发射率。最后,采用电子束热蒸发技术在玻璃基底上制备了六层结构的选择吸收膜,测试结果表明,该膜系在常温下的吸收率可以到达0.96,发射率为0.043。并通过计算给出了制备的六层选择吸收膜在100,200,300,400,500℃下的发射率分别为0.045,0.052,0.063,0.071和0.092。The Al2O3-Cr multi-layered coatings,for the solar selective absorption at medium and high temperatures,were deposited by electron beam evaporation on silicon substrates.The influence of the structures of the multi-layer,including the number of layer and layer thickness,on optical properties of the coating was characterized with ellipsometry.The four and six-layered coatings were designed.The tolerance of the six-layered coating was analyzed.The absorptance and emittance of the six-layered coating,with 20% relative error in thickness of the most sensitive layer,were evaluated.The six-layered coating,deposited on K9 glass substrate by electron beam evaporation,was tested.The absorptance and emittance at room temperature were found to be 0.96 and 0.043,respectively.The corresponding emittances,calculated at 100,200,300,400,and 500℃,are 0.045,0.052,0.063,0.071,and 0.092,respectively.

关 键 词：太阳能选择吸收薄膜 电子束热蒸发 吸收率 发射率 

分 类 号：O484.4[理学—固体物理]