甲烷流量对类金刚石薄膜氢含量和性能的影响  

Influence of Methane Flow Rate on Hydrogen Content and Properties of Diamond-like Carbon Films

作　　者：黄星烨[1,2,3] 孙瑶[1,2,3] 张保军[1,2] 汪洪[1,2,3] 

机构地区：[1]中国建筑材料科学研究总院,北京100024 [2]国家玻璃深加工工程技术中心,北京100024 [3]绿色建筑材料国家重点实验室,北京100024

出　　处：《武汉理工大学学报》2013年第5期8-12,共5页Journal of Wuhan University of Technology

基　　金："十二五"国家科技支撑计划(2011BAE14B01)

摘　　要：采用射频等离子体增强化学气相沉积(RF-PECVD)法,固定甲烷气压为1.33Pa,变化甲烷流量30～100sccm在玻璃上制备了一系列类金刚石(DLC)薄膜,采用残余气体分析仪、拉曼光谱和椭偏仪测试手段分别研究了甲烷等离子体中氢分压的变化、DLC膜中的氢含量和DLC膜的光学性能,采用摩擦磨损仪研究了DLC膜的耐摩擦性能。结果表明,随甲烷流量的增大,甲烷等离子体中的氢分压和DLC膜中的氢含量减小,光学带隙从1.77eV减小到1.65eV。在300～2 500nm的波长范围内折射率随流量的增大而增大,中心波长550nm的折射率从2.11增加到2.15。普通玻璃的摩擦系数约为1.2,而镀有DLC膜的玻璃的摩擦系数下降到0.4,甲烷流量为60sccm时制备的DLC膜耐磨性最佳。Diamond-like carbon films were deposited on glass under a constant pressure of 1.33 Pa by radio frequency plasma enhanced chemical vapor deposition（RF-PECVD） with various methane flow rate between 30 and 100 sccm.Residual gas analyzer and Raman spectroscopes were used to determine the hydrogen partial pressure in methane plasma and hydrogen concentration of DLC films,and spectroscopic ellipsometry was used to study the optical properties of DLC films.The friction property of DLC coatings was studied by friction and wear tester.The results showed that with the increase of methane flow rate,hydrogen partial pressure in methane plasma and the hydrogen concentration of DLC films decreased,and the optical gap decreased from 1.77 eV to 1.65 eV.While the refractive index in the wavelength range of 300 to 2 500 nm increased as methane flow rate increased and the refractive index of center wavelength 550 nm increased from 2.11 to 2.15.Friction coefficient of common glass was 1.2,while the friction coefficient of glass coated by DLC film reduced to 0.4,and the DLC film prepared at the methane flow rate 60 sccm had the best wear-resistance performance.

关 键 词：类金刚石薄膜 氢分压 拉曼光谱 摩擦性能 光学带隙 折射率 

分 类 号：O484[理学—固体物理]