菲涅耳微透镜芯模表面形貌的检测及加工误差分析  

Measurement and fabrication error analysis of FZP core mould

作　　者：邹文栋[1] 刘佳[1] 王星星[1] 江茂清[1] 龚勇清[1] 

机构地区：[1]南昌航空大学无损检测技术教育部重点实验室,江西南昌330063

出　　处：《光学精密工程》2013年第5期1160-1166,共7页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.51241005);江西省自然科学基金资助项目(No.2008GZW0011;No.20122BAB202010);江西省科技支撑计划资助项目(No.20122BBE500040);无损检测技术教育部重点实验室开放基金资助项目(ZD200929002);南昌航空大学研究生创新基金资助项目(No.YC2011014)

摘　　要：采用扫描白光干涉法对菲涅耳微透镜芯模表面浮雕结构进行了检测,并对元件表面微观形貌进行了三维重建。根据其表面形貌数据,引入幅度参数表征法,分别计算出横向线宽误差以及样品的系统刻蚀深度误差和随机刻蚀深度误差等纵向加工偏差。通过表面高度分布的偏斜度、表面高度分布的峭度等参数获得了有关微芯模表面误差和缺陷的量化信息。实验研究表明,扫描白光干涉法能精确定量化表征微芯模表面形貌特征,这对探索适用于新型微光学器件表面三维形貌误差的无损检测评价方法具有实际意义。To obtain the surface topography of micro core mould for a Fresnel micro-lens,scanning white light interferometry was used to test its surface relief structure.Then,the surface micro topography of the Fresnel micro-lens was reconstructed.With obtained topography data and introduced amplitude parameters,the fabrication errors on transverse line width,longitudinal systematic etching depth and random etch depth of the Fresnel Zone Plate（FZP） were calculated,respectively.By surface height distribution parameters,such as skewness and kurtosis,the micro mandrel surface errors and quantitative defect information were obtained.Experimental results show that scanning white light interferometry can characterize the surface topography of micro core mould for Fresnel micro-lens quantitatively and exactly,and the method proposed has practical significance for a non-destructive testing and evaluation for three-dimensional surface morphology of micro-optics.

关 键 词：菲涅耳微透镜 菲涅耳波带板 芯模 扫描白光干涉术 三维形貌 加工误差 

分 类 号：O436.1[机械工程—光学工程] TH744.3[理学—光学]