硅微振动陀螺仪设计与性能测试  

Design and experiment of micro machined vibratory gyroscope

作　　者：贾方秀[1] 裘安萍[1] 施芹[1] 苏岩[1] 

机构地区：[1]南京理工大学MEMS惯性技术研究中心,江苏南京210094

出　　处：《光学精密工程》2013年第5期1272-1281,共10页Optics and Precision Engineering

基　　金：国家自然科学青年基金资助项目(No.61201391);中国人民解放军总装备部预研基金资助项目(No.9140A09022309BQ02)

摘　　要：介绍了基于DDSOG(Deep Dry Silicon On Glass)工艺自主研发的硅微振动陀螺仪的结构,封装,及信号与性能检测。利用结构解耦的方法和DDSOG工艺设计和制备了双质量线振动式陀螺结构。为了提高它的机械灵敏度、可靠性和长期稳定性,采取真空封装技术实现了器件级真空封装,并消除了轴向加速度等共模干扰的影响。陀螺电路采用自激闭环驱动、开环检测的方式,简化了电路。为了降低环境温度对陀螺零偏的影响,研究了既定范围内陀螺的输出特性,建立了陀螺输出与温度之间的关系模型,设计了温度补偿电路,降低了陀螺整表的功耗和体积。对采用上述技术的硅微陀螺仪进行了性能测试,测试结果表明,陀螺Q值>100 000,量程为±500(°)/s,标度为21.453mV.(°)-1s-1,非线性和对称性分别为36.905×10-6和184.125×10-6。常温下陀螺零偏稳定性为7.714 3(°)/h,带宽为100Hz,整表体积为31mm×31mm×12mm,功耗为288mW。该陀螺仪性能好、体积小、功耗低,在中等精度的惯性导航系统中有较好的应用前景。A novel MEMS vibratory gyroscope was fabricated by our research group,and its structure,packaging,signal detection and performance measurement were described.The dual-mass MEMS vibratory gyroscope was designed by a structure-decoupled method and prepared by the Deep Dry Silicon On Glass（DDSOG）.To improve the mechanical sensitivity,reliability and stability,the gyroscope was packaged by vacuum technology and the common mode disturbance caused by axial acceleration was also eliminated.A self-resonance drive circuit with Automatic Gain Control（AGC） was employed in the drive closed loop to keep the stable amplitude and frequency of the drive-mode.The open loop detect circuit was adopted to simplify the whole control system.In order to reduce the temperature impact on the bias of gyroscope,the gyroscope＇s outputs within a certain temperature range were studied,and the relationship model between gyroscope outputs and temperature was established.On the basis of the model,a proper temperature real-time compensation system using a platinum resistor was designed to reduce the power comsumption,meanwhile to minimize the volume of the system.The experiment results show that the gyroscope has a quality factor above 100 000,the operating range of ±500（°）/s with the scale factor of 21.453 mV·（°）^-1·s^-1 and nonlinearity and asymmetry errors of 36.905×10^-6 and 184.125×10^-6 respectively.Moreover,at room temperature the bias of the gyroscope is 7.714 3（°）/h over a 100 Hz bandwidth,the whole system volume is 31 mm×31 mm×12 mm and the power consumption is 288 mW.The proposed vibratory gyroscope has a promising prospect for the inertial navigation system with a medium accuracy due to its high performance,small volume and low power consumption.

关 键 词：硅微振动陀螺仪 真空封装 自激驱动 温度补偿 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计] V666.123