故障树分析法在RIE故障诊断中的应用  

Application of Fault Tree Analysis for Fault Diagnosis of RIE Equipment

作　　者：马培圣[1] 

机构地区：[1]中国电子科技集团公司第十三研究所,河北石家庄050051

出　　处：《电子工业专用设备》2013年第5期62-64,共3页Equipment for Electronic Products Manufacturing

摘　　要：基于半导体刻蚀技术,对RIE(反应离子刻蚀)的技术原理和等离子启辉原理进行了阐述,概括介绍了故障树分析法,绘制了启辉故障的故障树,分析了造成该故障的各种原因,并根据维修经验介绍了APC(自动压力控制)故障和AMU(自动匹配网络)故障等一些典型因素的处理方法。Based on the semiconductor etching technology,theory of RIE process and plasma pulse are described.Fault Tree Analysis is introduced resumptively.A fault tree of plasma pulse is drawed.All kinds of possible causing the fault are analyzed.Depend on the work experience,some troubleshooting includes the solution of APC fault and AMU fault etc.are introduced.

关 键 词：反应离子刻蚀 等离子 故障树 自动压力控制 自动匹配网络 

分 类 号：TN305[电子电信—物理电子学]