MOEMS阿达玛变换光谱仪的可动光栅光开关阵列  

Line Array of Grating Moving Light Modulators for MOEMS Hadamard Transform Spectrometer

作　　者：岳秋琴[1] 张智海[2] 余华[2] 

机构地区：[1]重庆电子工程职业学院,重庆401331 [2]重庆大学新型微纳器件与系统技术国防重点学科实验室,重庆400044

出　　处：《中国机械工程》2013年第11期1489-1493,共5页China Mechanical Engineering

基　　金：国家自然科学基金资助项目(61074177)

摘　　要：根据微弱光谱信号的快速检测原理,构建了一种适用于阿达玛变换光谱仪的MOEMS(微光机电系统)可动光栅光开关阵列。对一种适用于补偿光栅光调制器件加工误差的阿达玛变换算法进行了分析,设计了以Al膜为主的表面微加工工艺流程,制作出MOEMS可动光栅光开关阵列。实验测试结果表明,可动光栅光开关阵列可以在低至8.1V的电压下进行光调制,开关频率达到140Hz,完全可以满足阿达玛变换光谱仪调制速度快、光谱范围宽、机械磨损小和误差小等要求。According to the faint light signal fast detection in HT（Hadamard transform） spectrom- eter, a line array of grating moving light modulators made by MOEMS technology was proposed. The paper presented a novel HT error compensation algorithm. After the fabrication process of GMLM （grating moving light modulator） was designed based on the A1 film micromachining technology, the line array device was manufactured in lab. Experimental results indicate that GMLM can work well under power supply voltage of 8.1V, and the switch frequency can reach up to 140Hz, which can sat- isfy the HT spectrometer requirements of fast modulation, wide spectrum, minor abrasion and er- rors.

关 键 词：阿达玛变换光谱仪 微光机电系统 可动光栅光开关阵列 误差补偿算法 

分 类 号：TH744[机械工程—光学工程]