YBa_2Cu_3O(7-δ)/势垒层/YBa_2Cu_3O_(7-δ)三层结构的制备  

FABRICATION OF YBa_2Cu_3O_(7-δ)/BARRIER/YBa_2Cu_3O_(7-δ) TRILAYER STRUCTURE

作　　者：孙志坚[1] 吉争鸣[1] 杨森祖[1] 吴培亨[1] 张世远[2] 张鸿才[2] 

机构地区：[1]南京大学信息物理系,南京210008 [2]南京大学物理系,南京210008

出　　处：《低温物理学报》1991年第5期334-337,共4页Low Temperature Physical Letters

基　　金：国家自然科学基金;国家超导研究开发中心的资助

摘　　要：本文采用射频磁控溅射法分别以 CeBa_2Cu_3O_(7-δ)和 MgO 为势垒层,原位制备出 YBa_2Cu_3.O_(7-δ)/CeBa_2Cu_3O_(7-δ)/YBa_2Cu_3O_(7-δ)和 YBa_2Cu_3O_(7-δ)/MgO/YBa_2Cu_3O_(7-δ)三层结构.文中给出了一些初步的实验结果,它们表明:在 YBa_2Cu_3O_(7-δ)薄膜与势垒层之间有较严重的互扩散.YBa2Cu3O7-δ/CeBa2Cu3O7-δ/YBa2Cu3O7-δ and YBa2Cu3O7-δ/MgO/YBa2Cu3O7-δ trila-yer structure with area of about 1mm2 were fabricated using in-situ rf magnetron sputtering. This letter reports some preliminary results, and they indicate presence of shorts which is more severe for the CeBa2Cu3O7-δ barrier than the MgO barrier.

关 键 词：YBACUO 势垒层 三层结构 超导薄膜 

分 类 号：TM262[一般工业技术—材料科学与工程]