声表面波SO_2气体传感器敏感膜的研究  

Thin Film of Surface Acoustic Wave Sensor for Sulfur Dioxide Gas

作　　者：魏培永[1] 朱长纯[1] 刘君华[1] 

机构地区：[1]西安交通大学,西安710049

出　　处：《西安交通大学学报》2000年第9期17-19,24,共4页Journal of Xi'an Jiaotong University

基　　金：国家自然科学基金资助项目! (6977760 37);教育部博士点基金资助项目! (980 6982 8)

摘　　要：为了深入研究声表面波 (SAW )SO2 气敏传感器频移与浓度之间的关系 ,对聚苯胺敏感膜的SAWSO2 传感器进行了试验与理论研究 ,并用双能谷模型推导了有关公式 .解释了频移与浓度关系曲线中的拐点问题 ,为聚苯胺敏感膜的SAW传感器应用提供了理论和实践依据 .将有机物聚苯胺 (PAn)和硫化镉 (CdS)两者的气敏特性进行了对比 ,得出了SO2 气敏膜具有双峰吸收的特点 ,并从理论上进行了论证 ,这对研究其他气敏膜也有指导意义 .PAn(polyaniline) thin film of surface acoustic wave (SAW) gas sensors was studied experimently and theoretically to explain the relations between frequency shift and sulfur dioxide concentration.Several formulas were derived using the double energy valley model to explain the critical dot of curve of frequency shift vs. sulfur dioxide gas concentration.Theory and experiment were provided to support the application of polyaniline thin film of SAW sensors. A polyaniline thin film was compared with a CdS thin film. The required characteristics of thin films for sulfur dioxide gas were obtained.

关 键 词：声表面波传感器 二氧化硫气体传感器 敏感膜 

分 类 号：O613.51[理学—无机化学] TP212[理学—化学]