涤纶基表面溅射纳米铜膜的导电性能  

Conductivity of polyester sputtered copper nanometer metal thin films

作　　者：黄新民[1] 孟灵灵[1,2] 

机构地区：[1]盐城工学院纺织服装学院,江苏盐城224051 [2]江南大学生态纺织教育部重点实验室,江苏无锡214122

出　　处：《印染》2013年第11期8-10,共3页China Dyeing and Finishing

摘　　要：采用正交试验方法优化涤纶基表面溅射纳米铜膜的工艺参数,其结果为:镀膜时间30 min,溅射功率120 W,气体压强0.2 Pa,基材表面等离子体预处理时间为3 min。测定了不同环境温湿度和不同水洗次数下薄膜的方块电阻,以及样品在室温下放置90 d后的形貌变化和电阻变化,以评价薄膜材料导电时效性。To evaluate the conductive stability and timeliness of polyester-based sputtered nano copper thin films, the optimum conductive process is determined via orthogonal experiments as follows： surface pretreatment of polyester with plasma for 3 min, plating for 30 min with sputtering power 120 W and pressure 0.2 Pa. The surface electric resistance of nano-copper films with different temperature, humidity and washing cycles are tested. For evaluating the conductive timeliness of the nano- copper films, the surface morphology are characterized by field emission scanning electron microscope （FE-SEM） at room temperature and atmosphere, and the electric resistance are observed by four-probe meter after exposure at room temperature and atmosphere for 90 days.

关 键 词：化学纤维织物 染整 磁控溅射 涤纶 导电性 

分 类 号：TQ153.3[化学工程—电化学工业]