新型压电叠堆式步进直线精密驱动器设计  

Design of Novel Sophisticated Stepping Linear Piezoelectric Stack Actuator

作　　者：苏江 刘鹏[2] 杨志刚[2] 

机构地区：[1]吉林大学珠海学院机电工程系,广东珠海519041 [2]吉林大学机械科学与工程学院,吉林长春130022

出　　处：《压电与声光》2013年第3期383-386,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(50605027)

摘　　要：提出了以压电叠堆作为驱动源的新型步进直线精密驱动器,分析了步进直线驱动器的工作原理,设计步进直线驱动器结构及其控制电压波形。为减少驱动器部件间摩擦,构建了滚动直线滑轨与驱动器结合的结构模型。制作了步进直线精密驱动器样机,并对样机进行实验测试,实验结果表明,驱动器的最小步距为0.05μm,最高运行速度为610μm/s,且运动性能稳定。A novel sophisticated stepping linear actuator was proposed based on piezoelectric stack as actuator element. Its working principle was analyzed, and the structure of the stepping linear actuator and control wave volt- age were designed. A model of actuator with linear rolling guide was established for reducing the sliding friction be- tween the parts of actuator. A prototype of actuator was made, and its performance was tested. The experimental results show that the actuator has minimum step distance of 0.05 μm and maximum speed of 610 μm/s, it works steadily.

关 键 词：步进直线驱动器 压电叠堆 滚动直线导轨 步距 

分 类 号：TH132[机械工程—机械制造及自动化] TN384[电子电信—物理电子学]