基于纳米压印技术制作的线偏振蓝光LED  

Fabrication of linearly polarized blue LED using nanoimprint lithography

作　　者：李万永[1] 韩彦军[1] 罗毅[1,2] 

机构地区：[1]清华大学电子工程系清华信息科学与技术国家实验室(筹),北京100084 [2]清华大学深圳研究生院半导体照明实验室,广东深圳518055

出　　处：《光电子．激光》2013年第6期1042-1047,共6页Journal of Optoelectronics·Laser

基　　金：国家科技支撑计划(2011BAE01B07;2012BAE01B03);国家重点基础研究发展计划"973"(2012CB315605;2011CB301900);国家高技术研究发展计划"863"(2011AA03A112;2011AA03A106;2011AA03A105);国家自然科学基金(61176015;60723002;61176059;60977022;51002085);北京市自然科学基金(4091001);广东省科技计划(2011A081301003)资助项目

摘　　要：提出一种准确计算LED偏振度(PR)的方法,并采用纳米压印技术制作了线偏振蓝光LED。方法考虑了LED朗伯型发光,计算整个半平面入射光透过光栅的TM模在TE和TM模中所占百分比。详细分析了光栅材料、光栅周期、占空比和光栅高度等对PR的影响,结果表明,当Al金属光栅周期为150nm、占空比为0.5和光栅高为120nm时,PR几乎为1;利用纳米压印技术结合感应耦合等离子刻蚀技术,制作了铝金属光栅。实际测试结果表明,将蓝光LED的偏振消光比(PER)由1.0∶1.0大幅度提高为2.2∶1.0。In this paper, a new method of accurate calculation of the polarization ratio （PR） and the fabrication of linearly polarized blue LED based on nanoimprint lithography of Al grating are proposed. Taking the lambertian emission pattern of LED into consideration,the PR ratio is calculated as the ratio of the light intensity of the transmitted TM mode to that of the transmitted TE and TM modes through the grating within the half-plane incident angle. Based on this method,the effects of the factors,such as the grating material, grating period, fill factor, grating height, on the PR ratio are analyzed. The results show that by using Al grating,the PR ratio is almost equal to 1 ,when the grating period,fill factor and height are 150 mm,0. 5 and 120 nm, respectively. In addition, the inductively coupled plasma etching of the Al grating is optimized. The experiment results indicate that the polarization extinction ratio （PER） of blue LED is substantially increased from 1.0 ： 1 to 2.2 ： 1.0.

关 键 词：线偏振LED Al金属光栅 偏振度(PR) 偏振消光比(PER) 纳米压印 

分 类 号：TN312.8[电子电信—物理电子学]