基于改进设计故障模式集成的PECVD优化设计  

Application Study of PECVD Design Based on Improving DFMEA

作　　者：吴晓松[1] 褚学宁[1] 程辉[1] 

机构地区：[1]上海交通大学机械与动力学院,上海200240

出　　处：《机械设计与研究》2013年第3期48-52,共5页Machine Design And Research

基　　金：国家自然科学基金资助项目(51075261);高等学校博士学科点专项科研基金资助课题(20120073110096);上海市科技创新行动计划资助项目(11dz1120800;12dz1125600)

摘　　要：设计故障模式及后果分析(DFMEA)能够在设计阶段充分考虑故障模式对产品功能的影响,从而提高产品设计的可靠度与安全性。但现有DFMEA的研究和应用缺少对多重条件约束的考量。基于此提出了优先理想矩阵与DFMEA集成的模型,将性能、成本、时间及其改进的余地运用到FMEA的严重性评价中。并且将此方法应用到等离子体增强化学气相沉积(Plasma Enhanced Chemical Vapor Deposition,PECVD)的设计中,提出了PECVD优化设计的流程和DFMEA计算模板。结果表明,此方法能够有效的进行PECVD故障原因与影响分析,及其系统优化设计。DFMEA is an important method of reliability assurance and preventive quality, which investigates and assesses all possible failure modes of a system during the earliest development phases. However, product design is a process of meeting multi-constraints which isn＇t considered by the existing DFMEA. So, a model of Priority-ideal matrix and DFMEA integration is proposed for the severity assessment of FMEA, by which the feature, cost, time and poten- tial are considered in order to eliminate the shortcomings of the existing DFMEA. The design process and template of the proposed method is developed for PECVD （Plasma Enhenced Chemical Vapor Deposition） design, which is finally illustrated to prove the feasibility of the proposed method.

关 键 词：产品设计 DFMEA 优先理想矩阵 设计方法 RPN 

分 类 号：TP311.13[自动化与计算机技术—计算机软件与理论] TP291.7[自动化与计算机技术—计算机科学与技术]