He^+辐照对非晶碳氢薄膜表面硬度的影响  

The influence of He ion irradiation on the surface hardness of amorphous hydrocarbon film

作　　者：孙莉[1] 范红玉[2] 李梦轲[1] 刘东平[2] 杨德明[2] 杨杞[2] 牛金海[2] 

机构地区：[1]辽宁师范大学物理与电子技术学院,辽宁大连116029 [2]大连民族学院物理与材料工程学院,辽宁大连116600

出　　处：《功能材料》2013年第B06期67-70,共4页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(20803007;11175038;10875025)

摘　　要：在室温下,利用等离子体增强的化学气相沉积法(PECVD)在硅衬底上制备了非晶碳氢薄膜。采用100keV,剂量分别为1.0×1015、5.0×1015、5.0×1016和1.0×1017ions/cm2的He离子(He+)对非晶碳氢薄膜进行辐照实验。通过基于原子力显微镜(AFM)的纳米压痕和纳米划痕技术,对He+辐照前后碳氢薄膜的表面硬度进行分析。结果表明,经He+辐照后碳氢薄膜的表面硬度明显增加,并且随着He+辐照剂量增加,碳氢薄膜的表面硬度呈逐渐增加的趋势。傅里叶变换红外光谱(FT-IR)和拉曼光谱分析表明,He+辐照会导致碳氢薄膜中sp2C键含量明显增加,而sp3C键及H原子的含量明显降低,这可能是引起碳氢薄膜硬度变化的主要原因。Amorphous hydrocarbon /llms were prepeucu w , J ---- deposition at room temperature. Then they were irradiated by 100keV He＋ with the dose of 1.0 × 10 , 5.0 × 10 , 5.0× 1016 and 1.0 ×1017 ions/cm2. The surface mechanical properties of as-deposited and He ion irradiated hydrocarbon films were analyzed by using atomic force microscopy AFM based nanoindentation and scratching tests. Their chemical compositions and structural properties were evaluated by FT-IR and Raman measure- ments. Analysis showed that the decreased content of bonded H atoms and increased fraction of sp C clusters after He ion irradiated samples may play a great role on the increase o[ the nanohardness.

关 键 词：非晶碳氢薄膜 辐照 硬度 纳米压痕 

分 类 号：TB321[一般工业技术—材料科学与工程]