一种电容式微加速度计偏置电压和标度因数自动标定方法  

An automatic calibration method of capacitive micro accelerometer bias voltage and scale factor

作　　者：耿赛柳[1] 徐大诚[1] 郭述文[1] 

机构地区：[1]苏州大学微纳传感器研究中心,江苏苏州215100

出　　处：《传感器与微系统》2013年第7期62-63,67,共3页Transducer and Microsystem Technologies

摘　　要：电容式微加速度计的电学参数校准和标定产品制造过程中,通过对标度因数的定标过程能确保传感器输出的线性度。采用MS3110微小电容读取电路,根据其输出函数的要求,只要确定Cs1,Cs2,Cf3个电容值,通过(1,0,-1 gn)三点即能确定标度因数(SF)和偏置电压,这样就实现了电容式微加速度计的标度因数自动标定。实验结果表明:通过多次自动定标,传感器标度因数的相对误差为0.79%。Capacitive micro accelerometer electrical parameter calibration and calibration product manufacturing process, through calibration process of scale factor can ensure the linearity of sensor output. Using MS3110 tiny capacitance reading circuit, according to the requirements of the output function, as long as Cs1, Cs2 , Cf three capacitance value is determined through three points （1,0, -1 gn ）can determine scale factor （SF）and bias voltage, so that automatic calibration of scale factor of capacitive micro accelerometer is realized. Experimental results show that through multiple automatic calibration,relative error of sensor scale factor is 0.79 %.

关 键 词：电容式微加速度计 标度因数 自动标定 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]