TiN薄膜在纳米压痕和纳米划痕下的断裂行为  

Fracture behavior of TiN coating under nanoindentation and nanoscratch test

作　　者：安涛[1,2] 文懋[2] 田宏伟[2] 王丽丽[1] 宋立军[1] 郑伟涛[2] 

机构地区：[1]长春大学理学院,长春130022 [2]吉林大学材料科学系,汽车材料教育部重点实验室,长春130012

出　　处：《物理学报》2013年第13期420-427,共8页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:50832001);吉林省科技发展计划项目(批准号:20120745);吉林省自然科学基金(批准号:201115134);教育部留学回国人员科研启动基金(批准号:2012940)资助的课题~~

摘　　要：利用磁控溅射方法在Si(111)衬底上制备了具有(111)和(222)择优取向的TiN薄膜.用纳米压痕和纳米划痕方法研究了该薄膜的变形和断裂行为.用扫描电子显微镜、纳米压痕原位原子力显微镜及原位光学显微镜并结合加-卸载曲线及划痕曲线获得了薄膜发生变形和断裂的微观信息.在压痕试验中,TiN薄膜在压入深度为200nm时表现为塑性变形及压痕周围的局部断裂,随着压入深度的增大,塑性变形和局部断裂变得越显著,当最大压入深度达到临界值1000nm时,薄膜和衬底间发生了界面断裂.在划痕实验中,100mN及200mN的最大载荷均可以引起界面断裂.最大为200mN的载荷使得薄膜发生界面断裂的位置比用100mN载荷时的位置提前,但其临界断裂载荷和100mN时及压痕实验时的临界界面断裂载荷基本相同.A TiN coating with （111） and （222） preferred orientations was deposited on a Si（111） substrate by using reactive magnetron sputtering a Ti target. The deformation mechanism and fracture behavior of the coating are determined by nanoindentation and nanocratch experiments. The morphologies of the indentations and nanoscratch marks are revealed by scanning electron microscopy, in situ atomic force microscopy and optical microscopy. Local cracks of TiN appear around the indentation marks when the peak indentation displacement is below the critical value of 1000 nm. As the peak displacement exceeds 1000 nm, an interfacial fracture between the TiN coating and the Si（111） substrate is observed. Nonoscratch tests show that interracial fractures are also induced by nanoscratch experiments under peak loads of 100 and 200 mN. The critical loads for interracial fractures under 100 and 200 mN peak loads are equal to those under nanoindentation tests.

关 键 词：TIN薄膜 纳米压痕 纳米划痕 界面断裂 

分 类 号：O484.1[理学—固体物理] TB383.2[理学—物理]