双激光位移传感器组合测头的光轴共线调校法  

Optic axis collinear adjustment method for the double laser displacement sensors combination probe

作　　者：刘新波[1] 付鲁华[1] 王仲[1] 兰太吉[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《光电子．激光》2013年第7期1363-1369,共7页Journal of Optoelectronics·Laser

基　　金：国家科技重大专项项目(2009ZX04014-092);高等学校博士学科点专项科研基金(20090032110048)资助项目

摘　　要：针对大型工件内尺寸高精度在机测量难题,介绍了一种双激光位移传感器组合定值比较测头,其功能可类比一把非接触式"内径千分尺",能实现快速、无损、高精度和自动化测量。测头在使用前,需保持两束激光的光轴重合,而分立的激光束是否满足这种位姿关系一般难以确定。针对此问题,分析了光轴位姿误差对检测精度的影响,给出了允差值,提出了一种激光光轴共线性测量、调整方法。分别利用已调校和未调校的测头对标准量块进行测量,证明了调校方案切实可行。This paper presents a non-contact probe with two laser displacement sensors for measuring the inner dimension of the large workpieees on machine. The probe＇s function can be analogized to a now contact internal micrometer which has the ability to make the measuring program fast, non-destructive, precise and easily automatic. Before utilizing the probe to measure the inner dimension,it should be guar- anteed that the optical axes of two lasers in the probe coincide. Howeverdt＇s generally difficult to ensure the discrete lasers meet the demand in practice. To solve the problem,this paper analyzes the influence of the probe＇ optic pose error on the detection precision, and gives the tolerance value through computing the terminal data. At the same time,we design the corresponding laser optical coaxial measurement and adjustment method based on the machine vision and a novel position transform. Finally, using the regula- ted and unregulated probes respectively to measure some standard gauge blocks, the results prove that the measurement and adjustment method is feasible,and the difference between the measured value by the regulated probe and the standard value of the gauge is just 4μm.

关 键 词：位姿调校 激光光轴 激光位移传感器 内尺寸测量 

分 类 号：TN247[电子电信—物理电子学]