平面电磁阻尼器的特性分析  

Characteristic Analysis of Planar Electromagnetic Dampers

作　　者：张赫[1] 寇宝泉[1] 金银锡[1] 杨国龙[1] 赵雄浩[1] 

机构地区：[1]哈尔滨工业大学电气工程及自动化学院,黑龙江省哈尔滨市150001

出　　处：《中国电机工程学报》2013年第21期138-144,203,共7页Proceedings of the CSEE

基　　金：国家科技重大专项(2009ZX02207-001;2012ZX04001-051);教育部新世纪优秀人才支持计划资助(NCET-08-0158)~~

摘　　要：电磁阻尼器是一种利用涡流阻尼作用使运动系统的震荡快速衰减的装置。在一些工业场合中,系统往往需要多自由度的阻尼力,传统方法是采用多个单自由度阻尼器进行组合,但是存在机械结构与系统构成复杂的缺点。该文提出一种平面电磁阻尼器,该阻尼器能够利用一个运动部件同时提供两正交方向的电磁阻尼力,具有结构简单、安全可靠等优点,可应用在光刻机工件台等需要两自由度快速稳定定位的场合中。介绍了平面电磁阻尼器的结构和工作原理,利用磁荷法和镜像法对永磁阵列的三维空间磁场进行解析,推导出电磁阻尼力的解析表达式。利用有限元对影响电磁阻尼力的尺寸参数进行分析,得到电磁阻尼力及阻尼系数的变化规律。实验结果与理论计算基本一致,验证了理论分析的正确性。Electromagnetic dampers can cause the oscillation of the dynamic systems to dissipate rapidly by making use of eddy current damping effect.In some industrial applications,multi-degree-of-freedom damping forces are needed.Traditional method is to adopt several single degree-of-freedom dampers which will bring about complex system structure.A planar electromagnetic damper is presented in this paper.The novel damper can provide two orthogonal damping forces with only one mover,which has the features of simple structure,high safety coefficient and so on.It can be used in fast positioning systems,such as wafer stage.The structure and working principle of the planar electromagnetic damper are introduced.The three dimensional magnetic field distribution and the damping forces are derived analytically by using the magnetic surface charge method and the image method.The main dimension parameters which have influence on damping forces are analyzed by finite element analysis.The variation tendency of damping forces and damping coefficient are obtained.Experiment results are in good agreement with the theoretical calculation.That verifies the validity of the theoretical analysis.

关 键 词：电磁阻尼器 两自由度 永磁阵列 磁场解析 

分 类 号：TM359[电气工程—电机]