非晶硅薄膜太阳能电池的紫外激光制绒工艺  

Texturing Process with 355nm Laser for Amorphous Silicon Film Solar Cell

作　　者：张超[1,2] 张庆茂[1] 郭亮[1,3] 吴煜文 吕启涛 

机构地区：[1]华南师范大学广东省微纳光子功能材料与器件重点实验室,广东广州510006 [2]广东工业大学物理与光电工程学院,广东广州510006 [3]华南理工大学机械与汽车工程学院,广东广州510641 [4]深圳市大族激光科技股份有限公司,广东深圳518000

出　　处：《中国激光》2013年第7期147-153,共7页Chinese Journal of Lasers

基　　金：国家863计划(2012AA040210);中央财政支持地方高校专项资金项目激光先进制造创新培养基地(510-C10293);粤港关键技术招标东莞专项(20092052060010);广东省教育部产学研结合重点项目(2010A090200048);广东省教育厅学科建设专项(C10360);华南理工大学国家金属材料近净成形工程技术研究中心开放基金(2011006)

摘　　要：为了提高非晶硅薄膜电池的转换效率和稳定性,采用纳秒紫外激光进行透明导电薄膜制绒,改变激光工艺参数,研究激光功率密度、重复频率、刻蚀速度和填充间距对透明导电薄膜电学、光学和晶体结构特性的影响;并根据不同制绒方式制备电池,比较其输出性能。实验结果证明:当激光功率密度P=0.85×105 W/cm2,刻蚀速度v=600mm/s,重复频率f=50kHz,填充间距Δd=0.012mm时,获得薄膜方块电阻较小,陷光效果良好的绒面结构,有效地增强了电池吸收率,提高了电池的转换效率。In order to enhance conversion efficiency and stability of thin film amorphous silicon solar cells, the nanosecond pulse laser is used to make the transparent conducting films textured. Transparent conducting film′s electrical, optical and crystal structure characteristics are discussed with changing laser parameters, such as laser power density, frequency repetition, etching speed and filling spacing. A comparison is made with the performance of cells manufactured by different texturing ways. The experiment results indicate that when laser power density is 0.85×105 W/cm2, etching speed is 600 mm/s, repetition frequency is 50 kHz, and filling spacing is 0.012 mm, the textured structure of transparent conducting films has less square resistance and more effective light trapping. It effectively improves the absorption, and enhances the conversion efficiency of cells.

关 键 词：光电子学 激光制绒 陷光效应 方块电阻 总透射率 绒度 

分 类 号：TN249[电子电信—物理电子学]