MEMS热膜式微流量传感器  

Hot-Film Micro Flow Sensors Based on the MEMS Technology

作　　者：侍艳华[1] 何秀丽[1] 高晓光[1] 贾建[1] 李建平[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室,北京100190

出　　处：《微纳电子技术》2013年第7期434-441,共8页Micronanoelectronic Technology

基　　金：国家高技术研究发展计划资助项目(2009AA04Z328)

摘　　要：针对气体红外吸收的气动探测应用,设计并制备了一种基于微电子机械系统(MEMS)技术的热膜式微流量传感器。研究了热敏电阻间距以及工作温度对传感器灵敏度的影响。当热敏电阻间距为200μm、工作温度为150℃以及气体流量在-5～5 mL/min时,微流量传感器输出信号与气体流量成线性关系,灵敏度约为299 mV/(mL/min)。微流量传感器气体流量理论检测下限约为1.7μL/min,在气体流量为6μL/min时,响应时间(90%)和恢复时间(90%)分别为16和34 ms。研究了微流量传感器温度补偿方法,消除了环境温度对灵敏度的影响。Abstract： According to the pneumatic detection application of the gas infrared absorption, a hot- film micro flow sensor was designed and fabricated based on the micro-electromechanical system （MEMS） technology. The effects of the space between the two thermistors and working tem- perature on the sensor sensitivity were investigated. When the space between the two thermistors is 200μm, the working temperature is 150 ℃, and the gas flow rate is from - 5 to 5 mL/min, there is a linear relationship between the output signal and gas flow rate, and the sensitivity of the sensor is about 299 mV/（mL/min）. The theoretical lower limit of the gas flow rate detection for the micro flow sensor is about 1.7 μL/min, and the response time （90%） and recovery time （90%） are 16 ms and 34 ms respectively at the gas flow rate of 6 btL/min. The temperature com- pensation method of the micro flow sensor was studied, and the effect of the environmental tem- perature on the sensitivity was eliminated.

关 键 词：微电子机械系统(MEMS) 微流量传感器 热膜式 温度补偿 Pt薄膜电阻 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH703[自动化与计算机技术—控制科学与工程]