紫外纳米压印OLED衬底微结构的制备技术  

Fabrication Technology of the OLED Substrate Microstructure by UV Nanoimprinting

作　　者：李阳[1] 徐维[1,2] 王忆[1] 

机构地区：[1]五邑大学应用物理与材料学院,广东江门529020 [2]西安交通大学先进制造技术研究所,西安710049

出　　处：《微纳电子技术》2013年第7期462-465,469,共5页Micronanoelectronic Technology

基　　金：广东省自然科学基金资助项目(S2011040005742;10452902001005900);广东省科技创新项目(2012KJCX0100);中国博士后基金资助项目(20090461297);江门市科技计划项目(2011010049758)

摘　　要：在有机发光二极管(OLED)器件衬底上制备可传递三维立体微结构可有效消除波导、增加出光耦合,从而增加器件出光效率。纳米压印技术是制备立体微结构的主要方法之一。采用紫外纳米压印技术在OLED衬底上制备三维立体微结构。首先采用电子束光刻(EBL)技术与干法刻蚀相结合的方法来制备高精度的紫外纳米压印模板;然后对模板进行清洗与抗粘连处理;最后采用紫外纳米压印技术在OLED衬底上成功制备了可传递三维立体微结构。制备结果表明,所形成的微结构具有均匀性好和压印精度高的特点。By fabricating the transferable three-dimensional microstructure on the substrate of the organic light emitting diode （OLED）, the waveguide is eliminated and the optical coupling is en- hanced effectively, then the luminous efficiency of the OLED is increased. The nanoimprint tech- nology is one of the main methods to fabricate the three-dimensional microstructure. The three- dimensional microstructure was fabricated on the OLED substrate with the UV nanoimprinting technology. Firstly, the UV nanoimprinting template with high-precision was fabricated using the method of the electron-beam lithography combined with the dry etching. Then, the cleaning and anti-stick treatment were carried out on the template. Finally, the transferable three-dimen- sional microstrueture was fabricated successfully on the （）LED substrate with the UV nanoim- print technology. The results show that the fabricated microstructure has the advantages of good uniformity and high imprint precision.

关 键 词：有机发光二极管(OLED) 衬底 微结构 模板 紫外纳米压印 

分 类 号：TN305.7[电子电信—物理电子学]