采用三角剖分算法的子孔径拼接检测技术  

Sub-aperture stitching testing technology based on triangulation algorithm

作　　者：闫力松 王孝坤[1] 罗霄 郑立功[1] 张学军[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所 中国科学院光学系统先进制造技术重点实验室,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《红外与激光工程》2013年第7期1793-1797,共5页Infrared and Laser Engineering

基　　金：国家自然科学基金(61036015);国家高技术研究发展计划(O8663NJ090)

摘　　要：为了解决大口径光学平面镜的子孔径拼接检测问题,基于三角剖分算法与最小二乘拟合算法,建立了一套合理的拼接算法和数学模型,编制了拼接程序,并结合工程实例,利用φ600 mm干涉仪实现了对612 mm×180 mm圆角矩型平面镜的拼接测量。检测中,基于靶标确定子孔径间的相对位置,完成子孔径间的对准,并且基于不同的镜体位置,对拼接检测的重复性进行了多次实验验证。实验结果表明:拼接结果无"拼痕",并且两次基于不同镜体位置计算获取的拼接面形PV与RMS的相对偏差分别为2.07%与0.52%,拼接面形是一致的,验证了检测的可靠性和准确性。In order to solve stitching testing problem of large-diameter optical flat mirror, based ontriangulation and least squares fitting, a reasonable stitching algorithms and mathematical models wereestablished and relative program was written. With engineering examples, a rounded rectangle planemirror of 612 mm x 180 mm was stitching measured with a ？）600 mm interferometer. In the testing,therelative position between the sub-apertures was determined based on the target, completing the alignmentbetween the sub-apertures, and based on different mirror locations, the repeatability of stitching testingwas verified with several experiments. The experimental results show that there is no “trace” in thestitching result and the relative deviation of the PV and RMS between the two experiments based ondifferent mirror location are 2.07% and 0.52%. The stitching result is consistent and the reliability andaccuracy of the stitching testing are verified.

关 键 词：光学检测 干涉测量 子孔径拼接 三角剖分 最小二乘拟合 

分 类 号：O439[机械工程—光学工程] O436.1[理学—光学]