压漏孔校准装置性能测试  

PERFORMANCE TESTS OF CALIBRATION APPARATUS OF PRESSURE LEAK

作　　者：张涤新[1] 张建军[1] 许珩 冯焱 龚月莉 

机构地区：[1]兰州物理研究所,甘肃兰州73000

出　　处：《真空与低温》2000年第3期165-169,174,共6页Vacuum and Cryogenics

摘　　要：正压漏孔校准装置可采用定容法和定量气体动态比较法进行正压漏孔的校准。定容法的校准范围是１００～５ × １０^（－３） Ｐａ· Ｌ／ｓ，不确定度小于９．１０％；定量气体动态比较法的校准范围是１×１０^（－２）～５×１０^（－５）Ｐａ·Ｌ／ｓ，不确定度小于１４．２０％。The methods of the constant volume and the dynamic comparison of quantitative gas are used in the calibration apparatus of pressure leak to calibrate the pressure leak. The calibration range of the leak rate is from 100 to 5 x 10-3 Pa' L/s and the uncertainty is less than 9. 10 % with the method of the constant volume; the range is from 1 x 10 -2to 5 x 10 -5 Pa' L/s, and the uncertainty is less than 14. 20 % with the method of the dynamic comparison of qauantitative gas.

关 键 词：正压漏孔 校准装置 性能测试 正压质谱检漏仪 

分 类 号：TB774.3[一般工业技术—真空技术]