快速傅里叶变换与泽尼克模式拟合的条纹投影面形恢复算法  

FFT-Zernike combined algorithm of wavefront reconstruction in measurement of optical surfaces based on projected fringes deflectometry

作　　者：刘江[1,2] 崔穆涵[1,2] 高松涛[1,2] 隋永新[1] 杨怀江[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033 [2]中国科学院大学,北京100049

出　　处：《应用光学》2013年第4期614-618,共5页Journal of Applied Optics

基　　金：国家科技重大专项(02专项)资助课题(2009ZX02205)

摘　　要：针对条纹投影偏折法中需要多次迭代进行面形恢复,提出一种结合快速傅里叶变换(FFT)算法与泽尼克(Zernike)模式拟合的算法(FFT-泽尼克)。数值仿真结果表明,直接使用泽尼克模式拟合,需要迭代15次,用时1min以上,而使用FFT-泽尼克算法,迭代5次已收敛到理想精度。在保证计算精度在纳米量级的情况下,计算时间也缩短了近2/3。The basic principle of projected fringes deflectometry is to measure the point-to-point relations of coordinates among free-form surface,camera and projection screen,and then compute the reconstructed surface with calculated slope data iteratively.In order to reduce the calculating time of the wavefront reconstruction without losing accuracy,a fast Fourier transform（FFT）-Zernike combined algorithm was proposed.The simulated result demonstrates the proposed algorithm can decrease the iterative procedure to 5times using less than 20seconds,compared with the traditional Zernike modal algorithm which has 15iteration times using more than 1minute.In addition,the calculating time is cut by two-thirds with the accuracy achieving the order of nanometer.

关 键 词：光学检测 FFT-泽尼克模式拟合算法 模式拟合算法 Southwell区域算法 条纹投影偏折法 

分 类 号：TN911.72[电子电信—通信与信息系统]