基于纳米CuO敏感电极混合位型NO_2传感器的研究  

Investigation on mixed potential NO_2 sensor based on nano-structured CuO sensing electrode

作　　者：王运飞[1] 王岭[1] 朱靖[1] 戴磊[1] 李跃华[1] 周会珠[1] 吴印林[1] 

机构地区：[1]河北联合大学化学工程学院,河北唐山063009

出　　处：《功能材料》2013年第15期2138-2142,共5页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(50972038;51272067);河北省钢铁联合基金资助项目(E2011209036;E2012209018)

摘　　要：采用溅射法制备的纳米结构CuO为敏感电极,钇稳定氧化锆(YSZ)为固体电解质制成了一种混合位型NO2传感器。采用X射线衍射仪(XRD)和扫描电子显微镜(SEM)分别表征了CuO敏感电极的相组成和微观形貌。研究了Cu的不同溅射时间对CuO敏感电极微观结构及传感器敏感性能的影响。结果表明,CuO颗粒随着Cu溅射时间的增长而增大,制成的传感器在600～700℃范围内对25～400mL/m3的NO2具有较好的敏感性能,传感器响应信号与NO2浓度的对数呈现良好的线性关系,其中60min,Cu传感器在650℃时灵敏度达41.47mV/decade,对于400mL/m3的NO2,90%的响应时间和恢复时间分别约为160、260s,体积分数0～10%的CO2对传感器的响应几乎没有影响,传感器具有较好的敏感度、重现性和稳定性。A mixed potential NO2 sensor was fabricated by using yttria-stabilized zirconia（YSZ） electrolyte and nano-structured CuO sensing electrode（SE） prepared by sputtering method.The composition and microstructure of the CuO sensing electrode were characterized by X-ray diffraction（XRD） and scanning electron microscopy（SEM）,respectively.The impact of sputtering time on the microstructure of CuO and the sensitivity of the sensor was studied.The results showed that with the increasing sputtering time,the CuO particle size increased.The sensors showed good sensitivity to 25-400mL/m3 NO2 and the response signals of the sensors were linearly dependent on the logarithm of NO2 concentrations in the temperature range of 600-700℃.The sensitivity of the 60min-Cu sensor was up to 41.47mV/decade at 650℃.The 90% response and recovery time of the sensor were 160 and 260s,respectively operating at 650℃,400mL/m3 NO2.The response was slightly affected by changing CO2 concentrations in the range of 0-10vol%.The sensor showed good response,recovery,reproducibility and stability.

关 键 词：溅射法 混合位型 NO2传感器 CuO纳米颗粒 YSZ 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]