SPC技术在声体波器件生产过程的应用  

Application of the Statistic Process Control Technique to Production Procedure of BAW Devices

作　　者：胡瑛[1] 朱昌安[1] 晏秋娟[1] 周勇[1] 吴燕[1] 王栋[1] 

机构地区：[1]中国电子科技集团公司第26研究所,重庆400060

出　　处：《压电与声光》2013年第4期463-466,477,共5页Piezoelectrics & Acoustooptics

摘　　要：针对高品质声体波微波(MBAW)器件的批量生产问题,研究了MBAW器件平面工艺路线的生产流程,选择蒸发底电极,溅射氧化锌,蒸发上电极及超声键合4个工序,应用统计过程控制(SPC)技术实施控制,确保MBAW器件在稳定受控状态下生产。本项应用不仅使这4个工序的工序能力指数(Cpk)得到提升,且MBAW器件的性能一致性和可靠性也得到明显提高,结果表明,几年来生产的MBAW器件没有再出现使用过程因质量问题的返退。Aiming at the problems of the batch production of microwave bulk acoustic wave（MBAW） devices with high quality,the production flow of the planar process route of MBAW devices has been studied.The statistic process control（SPC） technique has been applied to control the selected four processes of the bottom electrode evaporation,Zno sputtering,upper electrodes evaporation and ultrasonic bonding to ensure that the MBAW devices can be produced under the stably controlled state.This technique can not only improve the process capability index（Cpk） of the four processes,but also improve the performance consistency and reliabilities of MBAW devices.The results show that there are no returns of MBAW devices due to quality problems during recent years.

关 键 词：声体波器件 可靠性 统计过程控制(SPC) 工序能力指数(Cpk) 

分 类 号：TN12[电子电信—物理电子学]