基于误差隔离的触发式测头预行程标定方法  

Novel pre-travel calibration method of touch trigger probe based on error separation

作　　者：高峰[1,2] 赵柏涵[1] 李艳[1] 杨新刚[1] 陈纯[2] 

机构地区：[1]西安理工大学机械与精密仪器工程学院,西安710048 [2]陕西理工学院机械工程学院,汉中723003

出　　处：《仪器仪表学报》2013年第7期1581-1587,共7页Chinese Journal of Scientific Instrument

基　　金：国家科技重大专项(2012ZX04012032);陕西省自然科学基础研究计划重点项目(S2009JC1400)资助

摘　　要：触发式测头是在机测量系统的主要组成部分,其预行程会计入测量结果从而影响测量精度,因此有必要对其在实际工况下的预行程进行标定并补偿。在分析预行程产生原因的基础上,提出了一种全新的预行程定量标定方法,它通过在实际工况下检测探针与工件接触状况及接触时刻与测头触发时刻之间工件相对测头位移变化而标定出预行程,有效避免了机床伺服系统误差、机床几何及运动误差、探针测球圆度误差、标定体制造误差等因素对标定结果精确性的影响。标定了某高精密测头在实际工况下的预行程,并依据标定结果,完成了触发式测头预行程补偿实验。补偿结果表明,该标定方法实施简单、可行有效,标定精度高。Touch trigger probe is one of the important components in On-Machine Measurement （OMM） system, whose pre-travel value would be reckoned in the measured results and has an influence on the inspection accuracy, so the pre-travel calibration must be carried out to compensate the measured value under the actual conditions accurate- ly. Based on the analysis of the pre-travel generation causes, a novel pre-travel calibration method of touch trigger probe is proposed, in which the contact status between probe and workpiece is detected, and the displacement variation of the probe relative to the workpiece within the period between the contact time and the probe triggering time is measured, so that the pre-travel value is calibrated. The effects of various factors, such as the servo system error, geometric error and movement error of the machine tool, the roundness error of the probe sphere and the manufacturing error of the artifact, on the calibration accuracy are eliminated effectively. The pre-travel value of a certain high-precision probe was calibrated under actual conditions, and according to the calibration results the pre-travel compensation experiment of the touch trigger probe was carried out. The experiment results show that the calibration method is fea- sible and effective, can be implemented conveniently and has high calibration accuracy;and the On-Machine Measurement accuracy could be improved obviously.

关 键 词：触发式测头 预行程 标定方法 标定体 

分 类 号：TG806[金属学及工艺—公差测量技术] TH165.4[机械工程—机械制造及自动化]