PECVD制备六方金刚石结构碳氢薄膜  

Preparation of Hydrogenated Carbon Film with Hexagonal Diamond Structure by PECVD

作　　者：曹忠跃[1,2] 张斌[1] 魏利[1,2] 张俊彦[1] 

机构地区：[1]中国科学院兰州化学物理研究所固体润滑国家重点试验室,兰州730000 [2]中国科学院大学化学与化工学院,北京100049

出　　处：《中国表面工程》2013年第4期55-59,共5页China Surface Engineering

基　　金：国家自然科学基金(51275508);国家重点基础研究发展计划(973计划)(2013CB632300)

摘　　要：利用等离子体增强化学气相沉积技术(PECVD)在单晶硅(100)表面上制备了一层含有六方金刚石结构的碳氢薄膜。采用透射电子显微镜和拉曼光谱仪对薄膜结构进行表征;并用Nano-indenterⅡ型纳米压痕仪和CSM—摩擦磨损试验机对薄膜的力学性能和摩擦学性能进行了测试。结果表明:该碳氢薄膜含有六方金刚石结构,另外还含有少量的纳米弯曲石墨片段;与制备的类金刚石碳氢薄膜相比,该薄膜具有较好的力学性能,同时该薄膜在空气环境下表现出了较好的摩擦学性能。The hydrogenated carbon film with hexagonal diamond structure was deposited on n-type Si （100） substrate by plasma enhanced chemical vapor deposition （PECVD）. The microstructure of the film was investigated by high-resolution transmission electron microscopy （HRTEM） and Raman spectrum. The mechanical properties and tribological behaviors were tested by nano-indenter and CSM-tribometer. The experimental results show that the film has a hexagonal diamond structure, also contains a small amount of nano-graphite fragments; compared with the diamondlike carbon film, this film shows better mechanical properties and more excellent tribological properties in air.

关 键 词：等离子增强化学气相沉积 碳氢薄膜 六方金刚石 摩擦性能 

分 类 号：TG174.444[金属学及工艺—金属表面处理]