数字式小型激光球面干涉仪的研制  

DEVELOPMENT OF MINIATURE DIGITAL LASER SPHERICAL INTERFEROMETER

作　　者：杨力[1] 徐清兰[1] 伍凡[1] 郑耀[1] 

机构地区：[1]中国科学院光电所,四川成都610209

出　　处：《应用光学》2000年第C00期14-16,共3页Journal of Applied Optics

摘　　要：本文讨论数字式小型激光球面干涉仪设计研制目的、意义以及干涉仪的光学系统及仪器结构设计原则和设计精度指标分配。The goal and significance of development of the miniaturre digital laser spherical interferometer,the design principle of optical system and the overall structure, and the index distribution of design precision are discussed.The function requirements of the data processing system for interference patterns and software are briefly derscribed.

关 键 词：小型激光球面干涉仪 数字式 相位测量 

分 类 号：TH744.3[机械工程—光学工程]