一种新型分子玻璃光致抗蚀剂材料及其应用  

A Novel Molecular Glass Photoresist and Its Application

作　　者：徐娜[1] 宋金卓 赵飞[1] 

机构地区：[1]吉林化工学院研究生处,吉林吉林132022 [2]长春市锻造制品中心生产物资处,吉林长春130052

出　　处：《吉林化工学院学报》2013年第7期11-14,共4页Journal of Jilin Institute of Chemical Technology

摘　　要：分子玻璃体是在室温下为无定形态的低分子量材料.通过含大的脂环基团的一元羧酸和二乙烯基醚的反应,得到了一种新颖的酯缩醛结构分子玻璃体.该化合物具有单分散性且是无定形的,可溶于常用的溶剂,具有高的热稳定性.在室温或稍高温度下,该酯缩醛化合物可以被光产酸剂产生的强酸很快分解,从而易溶于稀的碱溶液.初步测试了它们与光产酸剂组成正型光致抗蚀剂体系的成像性质,得到了分辨率为0.5μm的清晰的图像.Molecular glasses are low-molecular-weight organic materials that readily form stable amorphous glasses above room temperature.A novel family of ester acetal molecular glass materials has been created by the reaction between monocarboxylic acid including big alicyclic group and divinyl ethers.These organic compounds are monodisperse and amorphous.They can be dissolved in common solvents and possess high thermal stability.The ester acetal compounds can be quickly decomposed at the presence of strong acid generated by photoacid generator（PAG） at room temperature or higher temperature and become easily soluble in dilute aqueous base.They can form positive photoresists together with PAG.The lithographic performance of the resist materials is being evaluated,and the resolution is about 0.5 μm.

关 键 词：分子玻璃体 正型光致抗蚀剂 酯缩醛化合物 光产酸剂 

分 类 号：TQ577[化学工程—精细化工]