两步法制备高择优取向的AZO薄膜  

Preparation of AZO Films with Highly Preferred Orientation by Two-step Method

作　　者：方华靖[1] 严清峰[1] 王晓青[1] 沈德忠[1] 

机构地区：[1]清华大学化学系,新型陶瓷与精细工艺国家重点实验室,北京100084

出　　处：《人工晶体学报》2013年第7期1257-1260,共4页Journal of Synthetic Crystals

基　　金：清华大学信息科学与技术国家实验室(筹)学科交叉基金;清华大学自主科研计划资助课题

摘　　要：通过水热生长的预处理步骤在普通玻璃载玻片表面铺设种子层,然后采用旋涂法在处理好的衬底上涂覆前驱体溶胶,成功地制备出沿(002)晶面择优取向生长的Al掺杂的ZnO薄膜(AZO)薄膜。利用X射线衍射分析、扫描电镜表征薄膜形貌,并测定薄膜的透射率及电阻率。研究了种子层对AZO薄膜结晶性能、表面形貌及光电性能的影响。结果表明:种子层减少了薄膜生长初期的非晶成份,促进了薄膜的晶化。薄膜在可见光范围内平均透射率超过85%,导电性能也有所改善。First, the surface of ordinary glass slides was laid with seed layer through a preprocessing step of hydrothermal growth. Then, homogenous and dense thin films were obtained through a sol-gel method. The AZO films exhibited a preferred orientation of c-axis perpendicular to the substrate surface. XRD, FESEM, UV-VIS and Hall tests were used to characterize chemical components, microstructure, optical and electrical properties of AZO films. The impacts of seed layer on the microstructure, morphology, transmittance and electrical properties of thin films were investigated. The experiment results showed that the seed layers reduced the amorphous component of the thin film at the time of initial growth and promoted the crystallization of the film. The average transmittance of the film in the visible range of are more than 85% and the conductive performance is also improved via the two-step growth process.

关 键 词：AZO薄膜 种子层 溶胶凝胶 光电性能 

分 类 号：O484[理学—固体物理]