一种光电编码器转角精度检测方法的误差分析  

Error Analysis on Measurement of Photoelectrical Encoder Corner Precision

作　　者：张桂林[1] 姜涛[1] 李敏[1] 

机构地区：[1]长春理工大学机电工程学院,吉林长春130022

出　　处：《中国激光》2013年第8期154-159,共6页Chinese Journal of Lasers

摘　　要：针对高精度光电编码器转角精度的检测,提出了一种基于双频激光干涉仪的光电编码器转角精度检测方法,并研制了相应的检测装置。该装置以步进电机为驱动元件,通过减速机构带动被检编码器和角度基准旋转,以Renishaw双频激光干涉仪为角度基准检测仪器,使用Renishaw RX10回转轴校准组件为角度旋转基准,检测精度达1.36″。分别使用该装置和传统手动检测装置对21bit绝对式编码器进行精度检测对比实验,结果表明,该装置是可行的,且在检测效率、检测精度上均高于传统检测装置。According to the detection accuracy of the high precision photoelectric encoder corner , a photoelectrical encoder corner precision measurement method based on dual-frequency laser interferometer is proposed. This device is driven by stepping motor. Through the reduction mechanism, the inspection encoder and the angle reference can be rotated. By using the Renishaw dual-frequency laser interferometer as the angle benchmark testing instruments and Renishaw RX10 rotors calibration module as large angle rotation reference, precision of 1. 36＂ is obtained. Traditional manual device and the proposed device in a 21 bit absolute encoder are used respectively for precision testing. The results show that the device is feasible, and that the test efficiency and precision are higher than those of the traditional detection device.

关 键 词：激光光学 双频激光干涉仪 光电编码器 转角精度 

分 类 号：O439[机械工程—光学工程]