耦合波分析中任意二维光栅介电常数的傅里叶分析  

Fourier Analysis of Dielectric Constant in Arbitrarily Shaped Two-Dimensional Grating for Coupled-Wave Analysis

作　　者：张强[1,2] 熊伟[2] 荣健[1] 

机构地区：[1]电子科技大学物理电子学院,四川成都610054 [2]中国科学院微电子研究所微电子器件与集成技术重点实验室,北京100029

出　　处：《激光与光电子学进展》2013年第9期1-7,共7页Laser & Optoelectronics Progress

基　　金：国家科技重大专项(2011ZX02101-005)

摘　　要：严格耦合波分析(RCWA)法在测量二维周期光栅的关键尺寸(CD)和获得其剖面结构中有着较为广泛的应用。在这个应用过程中需要对二维光栅周期单元的相对介电常数分布表达式进行傅里叶级数展开,而在以往的研究中只提出了几种规则光栅的傅里叶系数求解公式,从而使得能够应用RCWA方法进行衍射分析的光栅在形状方面受到了一定的限制。针对这一局限,运用矩形网格细分的方法得到了计算二维周期光栅的相对介电常数傅里叶系数的通用公式,它能够对任意形状的二维周期光栅相对介电常数分布进行傅里叶级数展开,并运用于衍射问题的RCWA方法分析之中。Rigorous coupled-wave analysis （RCWA） method is widely used in the critical dimension （CD） measurements and getting profile structure of two-dimensional periodic grating. In the application process, Fourier series expansion of formula for relative dielectric constant distribution in two-dimensional grating periodic unit is needed, but in the previous studies, the Fourier coefficient calculation formulas are only for several regular gratings, so the grating shape types whose diffraction analysis will be made by RCWA method are limited. To this restriction, new general Fourier coefficient calculation formulas for relative dielectric constant distribution in two-dimensional periodic grating are put forward by rectangular grid subdivision. They can be used for Fourier series expansion of relative dielectric constant distribution in arbitrarily shaped two-dimensional periodic grating and be used in RCWA method for diffraction problems.

关 键 词：光栅 二维光栅 傅里叶系数 网格细分法 严格耦合波分析法 介电常数 衍射 

分 类 号：O436.1[机械工程—光学工程]