磁控溅射Sn-Sb-Cu薄膜的制备及摩擦学性能研究  

Preparation and Tribological Properties Research of Magnetron Sputtered Sn-Sb-Cu Films

作　　者：李长生[1,2,3] 王芬[1,2] 胡志立[2,3] 孙建荣[2,3] 唐华[1,2] 

机构地区：[1]江苏大学材料工程学院,江苏镇江212013 [2]江苏省摩擦学重点实验室,江苏镇江212013 [3]江苏大学机械工程学院,江苏镇江212013

出　　处：《润滑与密封》2013年第9期1-5,41,共6页Lubrication Engineering

基　　金：国家自然科学基金项目(51275213);江苏省自然科学基金项目(BK2011534)

摘　　要：采用双靶磁控溅射方法,在合适的溅射参数下在40Cr钢基体上制备巴氏合金薄膜,并对其结构以及摩擦学性能进行分析。结果表明:薄膜中出现Sn,SbSn,Cu6Sn5多种物相,其纳米硬度为5.7 GPa,弹性模量为235 GPa,具有较高的弹性模量硬度比;油润滑时在合适的载荷和转速下巴氏合金薄膜和对磨件之间会形成动压油膜,从而降低摩擦磨损,其中在0.3 N载荷、150 r/min转速下摩擦因数可低至0.05;巴氏合金薄膜不适合用于干摩擦。Babbit alloy film was prepared on 40Cr steel base by double targets magnetron sputtering method with appropriate sputtering parameters, and its structure and tribological properties were analyzed. The results show that Sn, SbSn, Cu6Sns and other phases appear in the babbit alloy film. The film has a high ratio of elastic modulus to hardness, its nano hardness is 5.7 GPa, elastic modulus is 235 GPa. Under oil lubrication and a suitable load and speed, the dynamic pressure oil film appears between babbit alloy film and friction part, so as to reduce the friction and wear. A low friction coefficient of 0. 05 is got in the load of 0. 3 N and speed of 150 r/min. Babbit alloy films are not suitable to work in dry friction.

关 键 词：磁控溅射 Sn—Sb—Cu薄膜 干摩擦 油摩擦 

分 类 号：TH117.1[机械工程—机械设计及理论]