电容式微机械陀螺仪信号检测电路  

A Readout Circuit for Capacitive Vibratory Micro-Gyroscopes

作　　者：张云福[1] 吕梦琴[1] 罗亮[1] 李荣宽[1] 

机构地区：[1]电子科技大学电子工程学院,成都611731

出　　处：《传感技术学报》2013年第6期878-882,共5页Chinese Journal of Sensors and Actuators

摘　　要：提出了一种电容式微机械陀螺仪信号检测方案。该方案与将信号调制到高频后再检测的方案不同,所提方案只需在质量块上加一稳定直流电压,然后与敏感前端CV转换电路相连接,完成电容变化信号到电压信号的检测,因此,简化了电路结构,并且可以消除静态检测电容不相等所造成的误差和获得较低的等效输入噪声。对所设计的电路进行了简要介绍,并且对电路噪声性能进行了分析与推导,在Cadence环境下,基于标准0.25μm COMS工艺模型,对电路进行设计和仿真,显示该电路可达1.2 aF的电容分辨率。A capacitive readout circuit for micro-machined capacitive gyroscope is presented. Unlike the commonly used methods which need a high frequency carrier to modulate the signal to high frequency, this work applies a high DC voltage on the proof mass of the gyroscope sensor to make the circuit structure simpler and more flexible. In addition ,the proposed circuit is able to cancel the DC offset which caused by capacitance mismatch, lower the output noise. The total readout circuit will be discussed, and the noise performance is studied from a theoretical point of view. The circuit is designed based on standard 0.25 μm COMS process, under Cadence environment, the design is simulated and a capacitance resolution of 1.2 aF is achieved.

关 键 词：微机械陀螺 检测电路 仿真 电容分辨率 

分 类 号：V241.6[航空宇航科学与技术—飞行器设计]