磁控溅射法制备YBa_2Cu_3O_(7-x)双面超导薄膜  

Double-Sided YBa_2Cu_3O_(7-x) Films Deposited by Inverted Cylindrical Magnetron Sputtering

作　　者：王小平[1] 刘援[1] 王霈文[1] 冯稷[2] 林晨光[1] 华志强[1] 张朝兴[3] 

机构地区：[1]北京有色金属研究总院,北京100088 [2]香港城市大学物理及材料科学系 [3]信息产业部第十六研究所,合肥230043

出　　处：《稀有金属》2000年第6期470-473,共4页Chinese Journal of Rare Metals

基　　金：国家超导中心资助项目

摘　　要：采用大直径中空柱状阴极磁控溅射装置和筒形加热器制备了高质量YBa2 Cu3O7-x双面超导薄膜。使用衬底为 (0 0 1)LaAlO3和 (0 0 1)YSZ。双面超导薄膜零电阻温度TC=89～ 91K ,临界电流密度JC≥ 10 6A/cm2 (77K ,零场下 ) ,微波表面电阻RS<1mΩ(77K ,10GHz)。对不同氧氩比下制备的双面膜进行了性能的比较。当O2 ∶Ar =1∶2 .5 ,衬底温度在80 0℃时 ,制备出了高质量的双面超导薄膜。同时对双面超导薄膜进行了微结构分析。用制备的 2 5mm× 2 0mm双面膜研制成功中频滤波器 ,中心频率为 1 0 6GHz时 ,插损为 0 6 7dB。High quality of double sided YBa 2Cu 3O 7- x superconducting films deposited on (001) LaAlO 3 and (001) YSZ substrates were prepared by inverted cylindrical magnetron sputtering with a radiation heater. The properties of the double sided superconducting films are as following, T C≥90K, J C≥10 6 A/cm 2 at 77K and 0T and microwave surface resistance R S<1 mΩ at 77K and 10GHz. High quality superconducting films of two sides can be acquired with O 2∶Ar=1∶2.5 and substrate temperature of 800℃. Microstructure analysis to the double sided superconducting films was also performed. For the middle frequency filter prepared by 25mm×20 mm double sided films,the insertion loss is in order of 0.67 dB when the frequency of its center is 1.06 GHz.

关 键 词：磁控溅射 双面超导薄膜 YBA2CU3O7-X 

分 类 号：TM262[一般工业技术—材料科学与工程] O484.42[电气工程—电工理论与新技术]