SOI- Based3dB MMI Splitter  

作　　者：魏红振 余金中 刘忠立 张晓峰 史伟 房昌水 

出　　处：《Journal of Semiconductors》2000年第11期1055-1059,共5页半导体学报（英文版）

基　　金：Project Supported by National Natural Science Foundation of China Under Grant No.698962 60 and69990 540 .

摘　　要：A type of SOI based MMI 3dB splitter has been demonstrated. The geometry was analyzed and designed by effective index method and guide mode method. The fabrication tolerance was analyzed too. The device was fabricated and near field output was obtained. The device shows large width tolerance, low loss and low power uniformity.A type of SOI based MMI 3dB splitter has been demonstrated. The geometry was analyzed and designed by effective index method and guide mode method. The fabrication tolerance was analyzed too. The device was fabricated and near field output was obtained. The device shows large width tolerance, low loss and low power uniformity.

关 键 词：SOI 集成光学 多波干扰 MMI 分离器 

分 类 号：TN256[电子电信—物理电子学]