STABILITY ANALYSIS OF A CAPACITIVE FGM MICRO-BEAM USING MODIFIED COUPLE STRESS THEORY  

作　　者：Behrokh Abbasnejad Ghader Rezazadeh Rasool Shabani 

机构地区：[1]Mechanical Engineering Department, Urmia University

出　　处：《Acta Mechanica Solida Sinica》2013年第4期427-440,共14页固体力学学报（英文版）

摘　　要：Based on the Modified Couple Stress Theory,a functionally graded micro-beam under electrostatic forces is studied.The FGM micro-beam is made of two materials and material properties vary continuously along the beam thickness according to a power-law.Dynamic and static pull-in voltages are obtained and it is shown that the static and dynamic pull-in voltages for some materials cannot be obtained using classic theories and components of couple stress must be taken into account.In addition,it is shown that the values of pull-in voltages depend on the variation through the thickness of the volume fractions of the two constituents.Based on the Modified Couple Stress Theory,a functionally graded micro-beam under electrostatic forces is studied.The FGM micro-beam is made of two materials and material properties vary continuously along the beam thickness according to a power-law.Dynamic and static pull-in voltages are obtained and it is shown that the static and dynamic pull-in voltages for some materials cannot be obtained using classic theories and components of couple stress must be taken into account.In addition,it is shown that the values of pull-in voltages depend on the variation through the thickness of the volume fractions of the two constituents.

关 键 词：MEMS FGM micro-beam stability pull-in voltage electrostatic pressure modified couple stress theory 

分 类 号：TB34[一般工业技术—材料科学与工程] O33[理学—一般力学与力学基础]