红外测径仪YPIR-QT的应用及改进  

Application and improvement of infrared diameter test device YPIR - QT

作　　者：张红勇[1] 方军[2] 

机构地区：[1]西安理工大学,陕西西安710048 [2]西安工业大学,陕西西安710048

出　　处：《激光与红外》2013年第9期1040-1043,共4页Laser & Infrared

摘　　要：高质量锗单晶材料在信息产业、航空航天和国防军工等高新技术领域应用广泛。直拉法为锗单晶生长的主要方法,单晶直径检测是直拉法的重要环节。本文介绍锗单晶直拉法生长过程中,红外测径仪YPIR-QT的应用情况,对单晶直径进行测量,其输出信号作为单晶直径控制系统的反馈信号;同时,对红外测径仪YPIR-QT的智能化改进提出简要阐述。The high quality germanium plays an important role in the field of information industry,national defense and aviation etc.CZ growth method is popular for crystal germanium production.For CZ growth method,the crystal diameter test is the basic function.Firstly the application of infrared diameter test device YPIR-QT during the crystal germanium growth is introduced,single crystal diameter is measured,the output signal acts as feedback signal of crystal diameter control system.Secondly the future intelligent improvements for infrared diameter test device YPIR-QT are suggested.

关 键 词：直拉法 智能化改进 红外测径仪YPIR-QT 

分 类 号：TN219[电子电信—物理电子学]