电致发光器件衬底透镜微结构纳米热压印制备的研究  

Fabrication of organic light-emitting diode substrate microlens arrays using hot nanoimprinting technology

作　　者：李阳[1] 徐维[1] 王忆[1] 朱铭佳[1] 邝文钊[1] 

机构地区：[1]五邑大学应用物理与材料学院,广东江门529020

出　　处：《兵器材料科学与工程》2013年第5期52-55,共4页Ordnance Material Science and Engineering

基　　金：广东省自然科学基金(S2011040005742;10452902001005900);广东省科技创新基金项目(2012KJCX0100);中国博士后基金(20090461297);江门市科技计划基金项目(2011010049758)

摘　　要：采用纳米压印技术在OLED器件衬底上制备可传递三维立体透镜微结构,可有效减小波导、增加出光耦合,从而有望增加器件出光效率。采用紫外曝光与湿法腐蚀技术相结合的方法来制备高精度的石英玻璃纳米压印模板,对模板进行清洗与抗黏连处理。结果表明:所形成的透镜微结构具有平整度好、压印精度高的特点;此种方法制备微结构工艺简单易行,可大面积实现,工艺可操作性、重复性好。In order to increase the optical efficiency, transferable three-dimensional lens micro-structure which can reduce optical waveguide and increase light out-coupling was fabricated on the substrate using hot nanoimprinting technology. High-precision glass template for UV nanoimprinting was fabricated by combining UV exposure and wet etching technology; c｜eaning and anti- adhension treatment were used. The result shows that the lens micro- structures are characterized by good flatness, high nanoimprinting precision, likeliness to achieve a large area, to operate and to be reproducible.

关 键 词：OLED衬底 微结构 纳米热压印 

分 类 号：TN405[电子电信—微电子学与固体电子学]