Effectiveness of Radiofrequency Inductively Coupled Plasma Sources for Space Propulsion  

作　　者：V. A. Riaby P E. Masherov V. A. Obukhov V. P. Savinov 

机构地区：[1]Research Institute of Applied Mechanics and Electrodynamics of the Moscow Aviation Institute, National Research University, 5 Leningrad Rd., Moscow 125080, Russia [2]Physical Department, Moscow State University named alter M. V. Lomonosov, Lenin Hills, Moscow 119991, Russia

出　　处：《高电压技术》2013年第9期2077-2088,共12页High Voltage Engineering

基　　金：Project supported by the Frames of the Russian Federation Government’s Grant for StateSupport of Scientific Research Headed by High Rank Foreign Scientists(11.G34.31.0022)

摘　　要：Evolution of geometric forms of antenna coils for radiofrequency(RF)inductively coupled plasma(ICP)sources is analyzed.Top effectiveness of flat ICPSs generating plasma"tablet"is shown.Especially effective are ICPSs using antenna coils enhanced with ferromagnetic cores(FMICPS).It is found that the design of flat ICPSs is simpler and more convenient for the arrangement of plasma diagnostics in comparison with ICPSs of other geometries.Effective flat FMICPS models of different diameters ranging from 10 cm to 100cm are considered.Recommendations are given for development engineers dealing with ICPS devices in general and with radio frequency ion thrusters(RITs)in particular.Evolution of geometric forms of antenna coils for radiofrequency （RF） inductively coupled plasma （ICP） sources is analyzed. Top effectiveness of fiat ICPSs generating plasma ＂tablet＂ is shown. Especially effective are ICPSs using antenna coils enhanced with fer- romagnetic cores （FMICPS）. It is found that the design of fiat ICPSs is simpler and more convenient for the arrangement of plasma diagnostics in comparison with ICPSs of other geometries. Effective flat FMICPS models of different diameters ranging from 10 cm to 100 cm are considered. Recommendations are given for development engineers dealing with ICPS devices in general and with radio fi：equency ion thrusters （RITs） in particular.

关 键 词：电感耦合等离子体 等离子体源 空间推进 射频 等离子体诊断 几何形式 ICPS 离子推进器 

分 类 号：O657.31[理学—分析化学] O531[理学—化学]