减薄抛光对钽酸锂晶体热释电系数影响研究  

Research on effect of thinning and polishing on LT crystal pyroelectric coefficient

作　　者：林斯佳[1,2] 梁庭[1,2] 李颖[1,2] 高利聪[1,2] 周雷刚[1,2] 

机构地区：[1]中北大学 仪器科学与动态测试教育部重点实验室,山西太原030051 [2]中北大学 电子测试技术国防科技重点实验室,山西太原030051

出　　处：《传感器与微系统》2013年第10期52-53,60,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(51075375)

摘　　要：钽酸锂(LT)是一种优良的热释电材料,可以制作成高性能的热释电探测器。由于探测器的电压响应和探测率与红外敏感单元的厚度呈反比,所以对钽酸锂晶体的减薄成为器件成败的关键因素。采用化学机械抛光方法制作出厚度为30μm的超薄钽酸锂晶体,并使用电荷积分法配合计算机自动测试系统,对不同厚度和表面粗糙度的晶体热释电系数进行了测试和计算。测得最终制备的晶体的热释电系数达到了204μC·m-2K-1,显示出良好的热释电性能。LiTaO3 （LT） is a kind of excellent pyroelectric materials that can be made into high performance pyroeleetric detector. As the detector voltage response and detection rate inversely proportional to the thickness of the infrared sensing element, so thinning of LT crystals becomes a key factor of success. This design uses CMP method to produce 30 μm thickness of LT wafer and adopts charge integration method combined with computer automatic test system to test and calculate pyroeleetric coefficient of different thickness and surface roughness crystals. Measured pyroelectric coefficient of crystal achieves 204μC· m-2 K-1, which shows great pyroelectric properties.

关 键 词：钽酸锂 减薄抛光 原子力显微镜 热释电系数 

分 类 号：TN384[电子电信—物理电子学]